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Cleanroom Facility Basel: Overview and News

Micro- and Nanotechnological Cleanroom Facility Basel

On a large real estate of 400 m2, the Cleanroom Facility Basel (CRFB) is the hub for micro and nanofabrication serving the greater Basel area. The CRFB is a user facility, run and maintained by ETH Zurich, and is open to interested users from industry and academia.

A multitude of machines and processes are available for wafer sizes ranging from 4 to 8 inches. The clean room area is complemented by laboratories for back-​end processing, packaging, and metrology.  Moreover, we offer polymer processing and rapid prototyping.

In addition to providing first-class facilities, our team of technicians and engineers offers a broad range of services to industrial and academic customers including consulting and process development.