About
The high-end cleanroom and equipment is intended to support a broad variety of processes and applications. The different areas of the cleanroom laboratories are adapted to the processing requirements with level classifications between ISO-5 and ISO-7. Below are pictures of the different areas.
Floor plan
Entrance area of the cleanroom
Corridor in the center of the cleanroom providing access to the different processing bays.
Wet chemistry and etching area
Cross-beam machine room (SEM & FIB)
Photoresist spinning and developing area
Grey room area of plasma processing tools
Polymer processing area (e.g., SU-8)
Plasma processing tool area (deposition & etching)
Infrastructure area (ultrapure water)
Infrastructure area (ventilation)
