Large-scale integration of carbon nanotubes with CMOS published in "Advanced Materials"
Article on large-scale integration of carbon nanotubes with custom-designed CMOS microelectrode arrays was published in Advanced Materials.
In a collaboration between Riken, Kobe, Japan and our group, a high-yield process for the deposition of CNTs from a suspension by means of liquid-coupled floating-electrode dielectrophoresis (DEP) onto fully processed CMOS microelectrode array systems was developed (Adv. Mater. 2017, p. 1606852). 80% of the sensor devices featured less than five CNTs. Floating-electrode DEP was applied on full arrays and on individual devices, and the resistance distributions across the array of CNT devices were characterized with respect to different DEP parameters. The CNT devices were then operated as liquid-gated CNT field-effect-transistors (LG-CNTFET) in a liquid environment. The sensors were validated by studying the pH dependence of the LG-CNTFET conductance.