Lithography
Suss MA/BA 8 Gen4 mask aligner
UV-LED mask aligner of the latest generation.
- Adjustable for broadband and I-Line illumination
- Equipped for 4, 6 and 8 inch wafers as well as for chip-level processing
- High accuracy motorized alignment stage for front- and backside alignment
- Soft, hard and vacuum contact and proximity lithography
