Equipment

The CRFB is equipped for processing of 4, 6 and 8 inch wafers and for chip-level fabrication. One of our specialties is the post-processing of CMOS wafers, i.e., the deposition and patterning of dielectric and conductive as well as passivation layers. The facility and tools enable a wide range of microtechnological processes.  

With a steadily expanding inventory of equipment, we have fabrication tools for state-of-the-art research in electronics, physics, and biotechnology in our premises. We provide researchers and industrial customers with fabrication know-how and devices for efficient high-quality scientific work.