Analytics

The Veeco Dektak is a fast tool for measuring surface profiles and step heights in the micro and nanometer range.

Contact profilometer with nanometer accuracy
Compatible with samples up to 200 mm (8 inch) diameter
maximum step height 1 mm

Enlarged view: Photograph of a small laser spectroscope on a steel table — Filmetrics F20 Thin Film Spectrometer

Spectroscopic film thickness measurement system

15 nm - 70 µm thickness range
measurment of refractive index
large material library avaliable

3D Laser Scanning Microscope

Enlarged view: photo of a laser scanning microscope on a granite table with a computer workstation next to it — Keyence VK-X 3000 Confocal laser scanning microscope

3D profilometry via confocal laser scanning, focus variation and white light interferometry
sub-nanometer z resolution
film thickness measurement
automated measurements and stitching
powerful analysis software

The ZEISS Crossbeam Scanning Electron Microscope (SEM) is a cutting-edge instrument designed for high-resolution imaging and detailed material analysis. Up to 8 inch wafers can be loaded with the loadlock.

The large chamber is equipped with:

load lock for fast loading of substrates up to 8 inch in diameter
Focused Ion Beam (FIB)
Gas Injection System (GIS)
Energy Dispersive X-ray Spectroscopy (EDX)
Scanning Transmission Electron Microscopy (STEM) sensor
Detectors: SE2, BSD, ESB, InLens
Plasma cleaner