Lectures and Courses
Fall Semester
636-0103-00 G Lecture: Microtechnology
Yearly, Lecturer: Hierlemann, A.
Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the fabrication of mostly silicon-based microdevices and -systems and all related microfabrication processes.
Contents:
- Fundamentals of semiconductors and band model
- Fundamentals of devices: transistor and diode
- Silicon processing and fabrication steps
- Silicon crystal structure and manufacturing
- Thermal oxidation
- Doping via diffusion and ion implantation
- Photolithography
- Thin film deposition: dielectrics and metals
- Wet etching & bulk micromachining
- Dry etching & surface micromachining
- Microtechnological processing and fabrication sequence
- Optional: Packaging
636-0203-00L Lab Course: Microsystems and Microfluidics in Biology
Yearly, Lecturers: Dittrich, P. / Hierlemann, A.
This practical course is an introduction to microsystems technology and microfluidics for the life sciences. It includes basic concepts of microsystem design, fabrication, and assembly into an experimental setup. Biological applications include a variety of measurements of cellular and tissue signals and subsequent analysis.
The practical course will consist of a set of 4-8 experiments. For each experiment, the student will be required to
- understand the theoretical concept behind the experiment
- plan the experiment
- engineer the devices
- execute the experiments and acquire data
- evaluate and analyze the data
- report and discuss the results
Spring Semester
636-0114-00L: Microsensors and Microsystems
Every 2nd year (next 2020), Lecturer: Hierlemann, A.
Students are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers including mechanical, thermal, magnetic, chemical, optical, and biosensors. They also will get to know strategies to integrate components into microsystems.
Contents:
- Brief introduction to semiconductors
- Silicon and glass micromachining
- Wafer bonding
- Plastic materials and their micromachining
- Fundamentals of different transducers
- Mechanical sensors
- Thermal sensors
- Magnetic sensors
- Optical devices
- Chemical and biosensors
- Microfluidics
- BioMEMS