CMOS Microsystems
The notion of external page "microsystem" implies that we do not only devise single transducers, i.e., sensors or actuators, but that we develop rather complex systems comprising transducers, associated analog and digital circuitry units, and addressing and interface units on the same microchip.
Many of the systems are realized in Complementary-Metal-Oxide-Semiconductor or external page CMOS technology, which currently is the standard technology for the fabrication of integrated circuits on microelectronic chips. CMOS technology is used for implementing analog circuits, as well as for microprocessors, microcontrollers, and digital logic circuits.
Key advantages of microsystem integration include:
Signal Quality
- On-chip signal conditioning can be done close to the signal source, which enables the readout of low-level signals from very small transducers
- Miniaturization is possible without deterioration in transducer and overall system performance
- Analog-to-digital conversion can be done on chip, so that only robust digital signals are transmitted
Connectivity
- On-chip multiplexing enables to acquire signals from thousands of small transducers via few off-chip connections
- Integrated systems offer the possibility to perform massively parallel readout or multi-parameter detection
We follow the integrated-systems concept in devising and developing complex monolithic CMOS microelectrode and chemo & biosensor chips with large numbers of transducers and associated analog frontends, dedicated addressing schemes, signal conditioning circuits, digital logic and interface schemes. We have a fully established CMOS circuit design environment to perform analog and digital design of complex systems on chips.
Microelectrode Systems
Large high-density arrays of small electrodes (26,000 transducers in 2 by 4 mm² area) are realized that are integrated with signal conditioning (amplification and filtering) and stimulation circuits on the same chip. Applications include high-resolution extracellular electrophysiology and bioelectronics.
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Chemo & Biosensors
Different transducer types, such as microcapacitors, nanowires, and electrodes, are integrated with analog and digital circuitry units. Complex integrated systems are developed for electrochemical sensing based on potentiometry or cyclic voltammetry. Applications include the detection of bio- and disease markers or chemo- and bio-agents.
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