2016 IEEE "Robert Bosch micro and nano electro mechanical systems award" to Henry Baltes
"Robert Bosch Micro and Nano Electro Mechanical Systems Award" by the IEEE Electron Devices Society given to former head of PEL and BSSE founding professor Henry Baltes.
The Robert Bosch Micro and Nano Electro Mechanical Systems Award was given to former head of PEL and BSSE founding professor Henry Baltes for contributions to the exploration and development of CMOS-MEMS, to production using IC foundries and MEMS post-processing, and for inspirational leadership in the worldwide MEMS community.
The external page Robert Bosch Micro and Nano Electro Mechanical Systems Award award was established by the external page IEEE Electron Devices Society in 2014 to recognize and honor advances in the invention, design, and/or fabrication of micro- or nano- electromechanical systems and/or devices. The contributions to be honored by this award should be innovative and useful for practical applications. This award is sponsored by the IEEE Electron Devices Society with financial support from Robert Bosch LLC. The recipient receives a US$ 10'000 honorarium, a bronze medal, and a certificate.